Publication | Closed Access

Microstructural and electrical properties of different-sized aluminum-alloyed contacts and their layer system on silicon surfaces

Materials ScienceSurface CharacterizationElectrical EngineeringEngineeringMicrofabricationSurface AnalysisSurface ScienceApplied PhysicsElectronic PackagingSilicon SurfacesMicroelectronicsLayer SystemDifferent-sized Aluminum-alloyed ContactsMicrostructureSurface Processing