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HiPIMS deposition of TiOx in an industrial-scale apparatus: Effects of target size and deposition geometry on hysteresis

Materials EngineeringMaterials ScienceChemical EngineeringEngineeringCorrosionMicrostructureSurface ScienceMechanical EngineeringHipims DepositionHysteresisDeposition GeometryElectrode Reaction MechanismTarget SizeElectrochemistry