A single layer hydrogen silsesquioxane (HSQ) based lift-off process for germanium and platinum - Concepedia

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A single layer hydrogen silsesquioxane (HSQ) based lift-off process for germanium and platinum

DOI Full Paper Access

12

Citations

21

References

2009

Year

Vikram Passi, Aurélie Lecestre, Christophe Krzeminski, Guilhem Larrieu, Emmanuel Dubois, Jean‐Pierre Raskin

Microelectronic Engineering

Materials ScienceMaterials EngineeringHydrogen Energy TechnologyEngineeringSurface ScienceLift-off ProcessCatalysisHydrogenChemistryGermanene

References

	Year	Citations

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