Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 45 citations · 0 references
Natural SciencesMaterials SciencePhysicsMaterials PhysicsMetallic MaterialsSurface ScienceElectron DiffractionEpitaxial GrowthMetalsSemiconductor SurfacesSurface CrystallographySurface PhysicsDiffraction Pattern AnalysisElectron Diffraction IntensitiesElectron Diffraction TheoryEpitaxial OverlayersImpuritiesReflection High-energy Electron Diffraction
Oscillations in the intensity of reflection high-energy electron diffraction (RHEED) patterns are observed for Fe, Ni, Au, and Mn overlayers epitaxially grown in various combinations on Fe, Ni, Au, Ag, and Ru substrates. Fe whickers are nearly ideal substrates for the study of RHEED and RHEED oscillations during growth. Oscillations for metals and semiconductors show similar dependence on temperature, diffraction angles, and surface impurities.