Publication | Open Access
Dielectric liquid microlens with well-shaped electrode
79
Citations
17
References
2009
Year
Materials ScienceDielectric Liquid MicrolensElectrical EngineeringDielectricsEngineeringMicrofabricationAnalytical MicrosystemsMicroscale SystemBiomedical EngineeringAdaptive MicrolensesMicro-optical ComponentMicrofluidicsTop Planar ElectrodeElectrical InsulationMicroelectronics
A dielectric liquid microlens with a well-shaped electrode is demonstrated. The bottom well-shaped electrode and the top planar electrode induce an inhomogeneous electric field when a voltage is applied, which causes the focal length to change. Adaptive microlenses and microlens arrays with well-shaped electrode are fabricated and their performance is evaluated. The bi-convex structure introduces a larger optical power. Compared with common planar-electrodes liquid lenses, this well-shaped electrode not only inhibits drifting of the liquid but also reduces the operating voltage.
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