Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition - Concepedia

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Effects of ozone as an oxygen source on the properties of the Al2O3 thin films prepared by atomic layer deposition

79

Citations

15

References

2002

Year

Jaebum Kim, Kuntal Chakrabarti, Jinho Lee, Ki‐Young Oh, Chongmu Lee

Materials Chemistry and Physics

Materials ScienceOxygen SourceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsAl2o3 Thin FilmsThin FilmsChemical DepositionChemical Vapor DepositionAtomic Layer DepositionThin Film Processing

References

	Year	Citations

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