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On the mechanical behavior of a functionally graded micro-beam subjected to a thermal moment and nonlinear electrostatic pressure

Materials ScienceEngineeringMicromechanicsMechanical BehaviorMicrofabricationMechanicsMechanical EngineeringSolid MechanicsThermal MomentNonlinear Electrostatic PressureMaterial NonlinearitiesMechanics Of MaterialsMicro-electromechanical System