1982 · 12 citations · 0 references
Natural SciencesElectrical EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesThin FilmsDielectricsOxide SemiconductorsSemiconductor Device MaterialsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film MaterialsGate Dielectric EngineeringGate DielectricsOxide DielectricsSemiconductor Oxide Thin FilmsThin-film Dielectrics