Concepedia

Publication | Closed Access

Etch characteristics of silver by inductively coupled fluorine-based plasmas

DOI

10

Citations

8

References

2003

Year

S.D. Park, Y.J. Lee, S.G. Kim, Hee-Hwan Choe, M.P. Hong, G.Y. Yeom
Thin Solid Films

References

YearCitations

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