Plasma immersion ion implantation: duplex layers from a single process

Plasma source ion-implantation technique for surface modification of materials

J. R. Conrad, Joachim Radtke, R.A. Dodd et al. · Journal of Applied Physics · 1987 · 1.1K citations

Engineering, Materials Engineering, Materials Science +16

Plasma immersion ion implantation using plasmas generated by radio frequency techniques

J. Tendys, I.J. Donnelly, M.J. Kenny et al. · Applied Physics Letters · 1988 · 221 citations

Engineering, Physics, Metallurgy +13

Measurements of spatial and temporal sheath evolution for spherical and cylindrical geometries in plasma source ion implantation

M. Shamim, J.T. Scheuer, J. R. Conrad · Journal of Applied Physics · 1991 · 112 citations

Natural Sciences, Physics, Nuclear Instrumentation +14

Plasma immersion ion implantation of steels

George Collins, R. Hutchings, J. Tendys · Materials Science and Engineering A · 1991 · 106 citations

Engineering, Materials Engineering, Physics +11

Plasma source ion implantation: A new approach to ion beam modification of materials

J. R. Conrad · Materials Science and Engineering A · 1989 · 82 citations

Natural Sciences, Materials Engineering, Materials Science +11