Publication | Closed Access
Crystallization effects in oxygen annealed Ta2O5 thin films on Si
69
Citations
33
References
2001
Year
Materials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsThin Film Process TechnologyThin FilmsSilicon On InsulatorEpitaxial GrowthCrystallization EffectsThin Film Processing
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