Low-temperature epitaxy of silicon by electron beam evaporation - Concepedia

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Low-temperature epitaxy of silicon by electron beam evaporation

16

Citations

8

References

2007

Year

B. Górka, P. Dogan, I. Sieber, F. Fenske, S. Gall

Thin Solid Films

Electrical EngineeringEngineeringApplied PhysicsMolecular Beam EpitaxySilicon On InsulatorElectron Beam Evaporation

References

	Year	Citations

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