Thin Solid Films · 1997 · 34 citations · 20 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials CharacterizationMechanical Behavior Of MaterialsSemiconductor MaterialsCoating ProcessesCoatingsResidual StressSemiconductor DefectsSilicon MaterialsThin Film Mechanical PropertiesCarbon CoatingsResidual Stress In CoatingsResidual Stress ManagementSilicon Carbide (Sic) MaterialsSilicon-containing Alloys
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F. Tuinstra, Jack L. Koenig · The Journal of Chemical Physics · 1970 · 10.6K citations
Natural Sciences, Materials Engineering, Materials Science +15