Publication | Closed Access
Innovative concept for the fabrication of micromechanical sensor and actuator devices using selectively metallized polymers
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Citations
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References
2002
Year
Materials ScienceEngineeringMicromachinesMicrofabricationMechanical EngineeringPolymer ScienceBiomimetic ActuatorChemical ActuatorActuationInnovative ConceptMicroactuatorActuator DevicesMicrofluidicsMicromechanical Sensor
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