CoCr-sputtering in large scale roll coating systems

Abstract

CoCr-layers have been DC-magnetron sputtered onto Polyimide web in a 2 side sputter roll coater for 1.2 m web width. Magnetic as well as crystallographic properties have been investigated as function of the deposition parameters: layer thickness, coating drum temperature, background pressure and angle of incidence. First measurements of electro-magnetic properties also have been made. The influence of different protective layers on the lifetime of a CoCr floppy disk has been checked in first experiments.