Publication | Closed Access
Effect of substrate bias voltage on the structure, electric and dielectric properties of TiO2 thin films by DC magnetron sputtering
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Citations
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References
2011
Year
Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringNanoelectronicsOxide ElectronicsSurface ScienceApplied PhysicsDc MagnetronSubstrate Bias VoltageThin FilmsTio2 Thin FilmsMicroelectronicsChemical Vapor DepositionThin Film Processing
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