Publication | Closed Access
Imaging of laser generated surface ripples on silicon
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1988
Year
EngineeringMicroscopyBimorph ScannerTunneling MicroscopyElectron MicroscopyMicroscopy MethodOptical PropertiesInstrumentationLarge-scale Topographic MapsPhotonicsPhysicsNanotechnologySurface RipplesMicroanalysisSemiconductor SurfacesLaser Processing TechnologyLaser-assisted DepositionAdvanced Laser ProcessingScanning Probe MicroscopySurface ScienceApplied PhysicsLaser-surface Interactions
A scanning tunneling microscope is presented which is able to supply image data from the micrometer range down to atomic scales. By laser annealing corrugations can be generated on semiconductor surfaces with periodicities close to 1 μm. A bimorph scanner has been used to obtain large-scale topographic maps of these structures.