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Optimization and comparison of photonic crystal resonators for silicon microcantilever sensors

PhotonicsPhotonic SensorEngineeringMicrofabricationOptical PropertiesApplied PhysicsPhotonic Crystal ResonatorsPhotonic Integrated CircuitMicro-optical ComponentSilicon Microcantilever SensorsPhotonic DeviceOptoelectronicsPhotonic CrystalsPlanar Waveguide Sensor