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On the deposition process of silicon suboxides by a RF magnetron reactive sputtering in Ar–O2 mixtures: theoretical and experimental approach

Materials ScienceEngineeringAr–o2 MixturesOxidation ResistanceOxide ElectronicsSurface ScienceApplied PhysicsSilicon SuboxidesDeposition ProcessChemical DepositionChemical Vapor DepositionThin Film Processing