Emission cross sections for electron-impact-induced line radiation in the vuv from Ne, Ar, and Kr: Measurements and comparison with theory

Abstract

A set of 18 absolute cross sections for electron-impact-induced line radiation of Ne, Ar, and Kr in the spectral range between 46 and 100 nm was measured providing an accurate database for the use of an electron-impact excitation source as a source of calculable radiant flux. Unparalleled, low relative uncertainties, mostly below 4%, were achieved, mainly because the electron storage ring BESSY served as a primary standard source in the vuv to determine the responsivity of the spectrometer-detector system used for the cross-section measurements, and because a spinning rotor gauge was used as a secondary standard for the determination of the target gas density. A comparison of our cross-section data with published experimental and theoretical data is presented.