Physical properties and etching characteristics of metal (Al, Ag, Li) doped ZnO films grown by RF magnetron sputtering - Concepedia

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Physical properties and etching characteristics of metal (Al, Ag, Li) doped ZnO films grown by RF magnetron sputtering

25

Citations

16

References

2007

Year

S.H. Jeong, D.-G. Yoo, D.Y. Kim, Nae‐Eung Lee, Jin‐Hyo Boo

Thin Solid Films

Materials EngineeringMaterials ScienceElectrical EngineeringAluminium NitrideEngineeringNanoelectronicsOxide ElectronicsSurface ScienceApplied PhysicsRf MagnetronGallium OxideZno FilmsThin Film ProcessingPhysical Properties

References

	Year	Citations

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