Fabrication of a microbial carbon dioxide sensor using semiconductor fabrication techniques

Abstract

Abstract A disposable bacterial CO 2 sensor has been fabricated using semiconductor techniques by immobilizing autotrophic bacteria on the sensitive area of a miniature Clark‐type oxygen electrode and covering them with another gas‐permeable membrane consisting of a negative photoresist formed directly on the gel. The response time of the CO 2 sensor was 2 to 3 minutes. A linear relationship for the NaHCO 3 concentration was obtained between 0.5 and 3.5 mM at 30°C and pH 5.5. The CO 2 sensor can be used up to 10 times.