Publication | Closed Access
Mechanical and electrical properties of rf sputtered LaB6 thin films on glass substrates
20
Citations
4
References
1990
Year
Materials ScienceElectrical EngineeringMaterial AnalysisLab6 Thin FilmsEngineeringElectron-beam LithographyMicrofabricationNanoelectronicsGlass SubstratesApplied PhysicsPrinted ElectronicsElectronic PackagingThin FilmsMicroelectronicsElectrical PropertiesThin Film Processing
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