Microelectronic Engineering · 2003 · 13 citations · 11 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsThin FilmsElectrode MaterialsOxide SemiconductorsPerovskite MaterialsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsBarium TitanatePerovskite Electrode MaterialsStrontium Barium TitanateThin Oxide FilmsTitanium Oxides
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