Development of Microseparation Column for Ball Surface Acoustic Wave Gas Chromatograph

Abstract

For the safety and security of a society, ubiquitous multiple-gas sensors are required. The gas chromatograph (GC) based on the separation of gases according to the elution time is frequently used for multiple-gas sensing, but it is not portable. In this situation, we have developed a ball surface acoustic wave (SAW) sensor, where SAW on a sphere with a specific width is naturally collimated and makes multiple roundtrips without diffusing by diffraction. In this study, in order to develop a portable GC, we developed a gas separation column using micro-electro-mechanical-system (MEMS) technology and evaluated it, combining it with a ball SAW sensor.