Potential cerium precursors for blue colour in thin film electroluminescent devices grown by atomic layer epitaxy

Tuula Leskelä, Kirsi Vasama, Gitte Härkönen, Pertti Sarkio, Mauri Lounasmaa

Advanced Materials for Optics and Electronics · 1996 · 13 citations · 0 references

Concepts

Abstract

Two volatile β-diketonato complexes of trivalent cerium, Ce(thd)3phen and Ce(tpm)3, were prepared and characterised with TG, DTA, FTIR and MS and used in ALE processing of electroluminescent SrS:Ce thin films. The results were compared with those obtained with the typically used precursor Ce(thd)4. TG measurements were employed to simulate the precursor vaporisation in ALE. The most interesting results were the enhanced electroluminescence obtained with Ce(thd)3phen and the colour shift towards blue with the fluorinated precursor Ce(tpm)3. With the latter precursor the luminance was poor and the growth rate of SrS was decreased as well.