LTCC Microfluidic System

Abstract

A simple and inexpensive low‐temperature cofired ceramic (LTCC) microfluidic device with integrated optical fibers is designed, manufactured, and tested with positive results. Fluidic channels, mixer, detector, optical fiber, light source, light detector, heater, and temperature sensor are integrated in one LTCC module. The optical system in the LTCC microsystem permits measurements of light transmittance and fluorescence. The design, technology, and results of the module's evaluation are presented.