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A micromachined piezoresistive accelerometer with high sensitivity: design and modelling

EngineeringHigh SensitivityMicrofabricationMechanical EngineeringMechatronicsMechanical SystemsAccelerometerMicroelectromechanical SystemsMicroactuatorInstrumentationVibration ControlMicro-electromechanical SystemMicromachined Ultrasonic Transducer