Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane - Concepedia

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Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane

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Citations

21

References

2012

Year

Vladimir R. Shayapov, Yu. M. Rumyantsev, A. A. Dzyuba, B. M. Ayupov

Applied Surface Science

Materials EngineeringMaterials ScienceEngineeringMechanical EngineeringApplied PhysicsMechanical StressesHigh-performance MaterialMaterial PerformanceSilicon Carbonitride FilmsThin FilmsChemical Vapor DepositionMechanics Of MaterialsThin Film Processing

References

	Year	Citations

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