Three-dimensional photonic crystals for optical wavelengths assembled by micromanipulation

Abstract

We have established a profitable fabrication technique for three-dimensional (3D) photonic crystals for optical wavelengths. In our method, two-dimensional photonic plates, which serve as unit parts for 3D structures, are prepared by the semiconductor nanofabrication technique. Then, these plates are assembled into 3D structures by micromanipulation. Accurate lamination of the plates is assured by linking fiducial holes of neighboring plates with matching microspheres. With this technique, we have succeeded in fabricating 3D photonic crystals with one to four layers of woodpile structures. From scanning electron microscope observation of the crystals, the periodic error was determined to be within 50 nm. The optical properties of the crystals indicate existence of the photonic band gap at the expected wavelength of 3–4 μm.