Space-Limited Crystal Growth Mechanism of TiO₂ Films by Atomic Layer Deposition

Abstract

In this paper, a novel space-limited crystal growth mechanism of TiO 2 films on a Si substrate by ALD is presented. The results show that two distinct grain-growth behaviors are observed at two different growth temperature ranges. At 300−500 °C, grain growth of the films has a conventional temperature dependence with an activation energy of about 12.39 kJ/mol. However, the grain growth has an unconventional temperature dependence, as the grain size decreases with increasing growth temperature for films grown at temperatures between 150 and 250 °C. This TiO 2 growth is dominated by the surface nucleation of the films. It is suggested that this interesting phenomenon may also occur for other materials grown by ALD. In addition, the nucleating kinetics of ALD-TiO 2 films has also been investigated, and the nucleating activation energy of films is approximately 48.25 kJ/mol.