Concepedia
Surface and Interface Analysis · 1984 · 30 citations · 1 references
EngineeringElectrical EngineeringMaterials CharacterizationMetrologyCertificationComposition-depth ProfilesDepth ProfilingReference Material CharacterizationReference Material ValidationReference Standard Analysis
1
Characterization of a high depth‐resolution tantalum pentoxide sputter profiling reference material
C. P. Hunt, M. P. Seah · Surface and Interface Analysis · 1983 · 96 citations
Natural Sciences, Materials Engineering, Materials Science +16