Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials

Abstract

A programmable micromechanical resonator based on a VO2 thin film is reported. Multiple mechanical eigenfrequency states are programmed using Joule heating as local power source, gradually driving the phase transition of VO2 around its Metal-Insulator transition temperature. Phase coexistence of domains is used to tune the stiffness of the device via local control of internal stresses and mechanical properties. This study opens perspectives for developing mechanically configurable nanostructure arrays. As a service to our authors and readers, this journal provides supporting information supplied by the authors. Such materials are peer reviewed and may be re-organized for online delivery, but are not copy-edited or typeset. Technical support issues arising from supporting information (other than missing files) should be addressed to the authors. Please note: The publisher is not responsible for the content or functionality of any supporting information supplied by the authors. Any queries (other than missing content) should be directed to the corresponding author for the article.