Publication | Closed Access
High-rate deposition of Sb-doped SnO2 films by reactive sputtering using the impedance control method
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Citations
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References
2011
Year
Materials EngineeringMaterials ScienceElectrical EngineeringEngineeringNanoelectronicsOxide ElectronicsSurface ScienceApplied PhysicsSb-doped Sno2 FilmsHigh-rate DepositionThin FilmsChemical DepositionImpedance Control MethodThin Film Processing
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