Proton scattering microscopy

Abstract

Abstract The regular nature of the crystal lattice has a marked influence on the spatial distribution of protons elastically scattered from the surface of a single crystal, inasmuch as the close-packed rows and planes of atoms prevent protons emerging in certain well-defined crystallographic directions. This results in the formation of regular patterns, called ‘proton blocking patterns’ on a fluorescent screen held parallel to the crystal surface. This paper describes a technique based on this phenomenon which can be employed at proton energies below 50 kev to study the structures of crystals and thin films, and to examine the effects of radiation damage produced during the ion implantation doping of semiconductors.