Chemical bonding states and local structures of the oriented hexagonal BCN films synthesized by microwave plasma CVD - Concepedia

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Chemical bonding states and local structures of the oriented hexagonal BCN films synthesized by microwave plasma CVD

36

Citations

31

References

2008

Year

Md. Abdul Mannan, Hideyuki Noguchi, Tetsuya Kida, Masamitsu Nagano, Norie Hirao, Yuji Baba

Materials Science in Semiconductor Processing

Materials ScienceBoron NitrideLocal StructuresEngineeringPhysicsHexagonal Boron NitrideChemical Bonding StatesApplied PhysicsMicrowave Plasma CvdChemical Vapor DepositionPlasma Processing

References

	Year	Citations

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