Materials Science and Engineering A · 2002 · 31 citations · 23 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsElectronic MaterialsThin FilmsMagnetic Thin FilmsMetalsThin Film Electrical PropertiesThin-film DepositionThin-film MaterialsMetal Thin FilmsMetallic Thin Films
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Thin-film shape-memory alloy actuated micropumps
William L. Benard, H. Kahn, A. H. Heuer et al. · Journal of Microelectromechanical Systems · 1998 · 375 citations