Journal of Applied Physics · 1999 · 357 citations · 24 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsOptoelectronicsThin FilmsMetal OxidesOptical Properties Of SemiconductorsOptical Properties Of SolidsOptical Thin FilmsThin Film Electrical PropertiesThin Film Optical PropertiesBand GapElectrical PropertiesEpitaxial Thin FilmsExciton Binding EnergyOptical PropertiesPhotoluminescencePulsed Laser DepositionZinc Oxides
The optical properties of high quality single crystal epitaxial zinc oxide thin films grown by pulsed laser deposition on c-plane sapphire substrates were studied. It was found that annealing the films in oxygen dramatically improved the optical and electrical properties. The absorption coefficient, band gap, and exciton binding energies were determined by transmission measurements and photoluminescence. In both the annealed and the as-deposited films excitonic absorption features were observed at both room temperature and 77 K. In the annealed films the excitonic absorption peaks were substantially sharper and deep level photoluminescence was suppressed.
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