Size-dependent second-harmonic generation by nanocrystals prepared by plasma-enhanced chemical-vapor deposition

Abstract

The second-harmonic generation (SHG) from silicon nanocrystallites in polycrystalline films prepared by low-temperature plasma-enhanced chemical-vapor deposition has been studied. We observed an increase in the SHG signal due to the quantum-size effect and shape distortion by decrease in the sizes of crystallites. It was shown that the resonant SHG spectra have a size-dependent fine structure. Also, the power dependence of the SHG response from polycrystalline silicon films was investigated.