Publication | Closed Access
Nanoindentation study of plasticity length scale effects in LIGA Ni microelectromechanical systems structures
51
Citations
23
References
2003
Year
Materials ScienceEngineeringMicromechanicsMicrofabricationMechanical EngineeringApplied PhysicsNano Electro Mechanical SystemPlasticityNanomechanicsNanoindentation StudyMicrostructure
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