The fringe capacitance formula of microstructures

Abstract

This paper presents a fringe capacitance formula of microstructures. The formula is derived by curve fitting on ANSYS simulation results. Compared with the ANSYS and experimental results, the deviation is within ±2%. The application to determine the pull-in voltage of an electrostatic micro-beam is demonstrated, which agrees very well with the experimental data. The formula presented is very accurate, yields explicit physical meanings and is applicable to common dimension ranges for MEMS devices.