Publication | Closed Access
Fabrication of nickel stamp with improved sidewall roughness for optical devices
17
Citations
7
References
2011
Year
Materials ScienceOptical MaterialsEngineeringBeam LithographyMicrofabricationOptical PropertiesFabrication TechniqueApplied PhysicsNickel StampNanolithography MethodOptoelectronicsOptical Devices3D PrintingImproved Sidewall RoughnessDepth-graded Multilayer Coating
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