Fabrication of nickel stamp with improved sidewall roughness for optical devices

Correlation of Scattering Loss, Sidewall Roughness and Waveguide Width in Silicon-on-Insulator (SOI) Ridge Waveguides

K. P. Yap, A. Delâge, J. Lapointe et al. · Journal of Lightwave Technology · 2009 · 108 citations

Engineering, Electrical Engineering, Materials Science +15

Planar lightwave circuit devices for optical communication: present and future

Hiroshi Takahashi · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 60 citations · Full text

Engineering, Communication, Electrical Engineering +17

Interference effect in scattering loss of high-index-contrast planar waveguides caused by boundary reflections

Jens H. Schmid, A. Delâge, B. Lamontagne et al. · Optics Letters · 2008 · 29 citations

Natural Sciences, Electrical Engineering, Physics +17

Reduction of sidewall roughness in silicon-on-insulator rib waveguides

Fan Gao, Yaohui Wang, Gang Cao et al. · Applied Surface Science · 2005 · 28 citations

Engineering, Electrical Engineering, Materials Science +14

Imprinted polymer stamps for UV-NIL

Tomi Haatainen, Tapio Mäkelä, Jouni Ahopelto et al. · Microelectronic Engineering · 2009 · 16 citations

Engineering, Materials Engineering, Materials Science +9