Time-Domain CMOS Temperature Sensors With Dual Delay-Locked Loops for Microprocessor Thermal Monitoring

Abstract

We report on CMOS temperature sensors that work by measuring temperature-dependent delays in CMOS inverters. Two new features distinguish this work from the prior delay-based temperature sensors. First, our sensor operates with simple, low-cost one-point calibration. Second, it uses delay-locked loops (DLLs) to convert inverter delays to digital temperature outputs: the use of DLLs enables low energy (0.24 <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\mu$</tex> </formula> J/sample) and high bandwidth (5 kilo-samples/s), facilitating fast thermal monitoring. After calibration, measurement errors for 15 chips fabricated in digital CMOS 0.13 <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\mu$</tex> </formula> m fall within <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$-4.0\sim 4.0\, ^{\circ}{\hbox {C}}$</tex></formula> in a temperature range of <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$0\sim 100\, ^{\circ}{\hbox {C}}$</tex> </formula> , where the temperature chamber used has a control uncertainty of <formula formulatype="inline" xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex Notation="TeX">$\pm 1.1\, ^{\circ}{\hbox {C}}$</tex> </formula> . Microprocessor thermal profiling can be a potential application.