Nitric acid oxidation of Si (NAOS) method for low temperature fabrication of SiO2/Si and SiO2/SiC structures - Concepedia

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Nitric acid oxidation of Si (NAOS) method for low temperature fabrication of SiO2/Si and SiO2/SiC structures

46

Citations

60

References

2010

Year

H. Kobayashi, Kentaro Imamura, W.-B. Kim, Sangkyun Im, Asuha

Applied Surface Science

Materials EngineeringMaterials ScienceChemical EngineeringEngineeringLow Temperature FabricationApplied PhysicsSemiconductor Device FabricationNitric Acid OxidationSio2/sic StructuresSilicon On InsulatorCarbide

References

	Year	Citations

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