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Formation of dense submicronic clouds in low pressure Ar-SiH4 RF reactor: Diagnostics and growth processes from monomers to large size particulates

DOI

24

Citations

0

References

1996

Year

A. Bouchoule, Laïfa Boufendi, Jörg Hermann, André Plain, T. Hbid, Gmw Gerrit Kroesen, E. Stoffels, W. W. Stoffels
Pure and Applied Chemistry

Abstract

Abstract