Concepedia

Formation of dense submicronic clouds in low pressure Ar-SiH4 RF reactor: Diagnostics and growth processes from monomers to large size particulates

A. Bouchoule, Laïfa Boufendi, Jörg Hermann, André Plain, T. Hbid, Gmw Gerrit Kroesen, E. Stoffels, W. W. Stoffels

Pure and Applied Chemistry · 1996 · 24 citations · 0 references

DOI

Concepts

Abstract

Abstract