Prevention of InP surface decomposition in liquid phase epitaxial growth

G. A. Antypas

Applied Physics Letters · 1980 · 80 citations · 3 references

Concepts

Abstract

Decomposition of InP prior to and following liquid phase epitaxial growth can be completely eliminated by locally providing an increase in P partial pressure compared to that at the InP liquidus. The increase of P partial pressure is a result of increased P solubility in In-Sn-P solutions.

References

3