Growth of TiO2 thin film by reactive RF magnetron sputtering using oxygen radical

Hiroshi Ogawa, Tohru Higuchi, Akihiro Nakamura, Sumio Tokita, Daisuke MIYAZAKI, T. Hattori, Tatsuya Tsukamoto

Journal of Alloys and Compounds · 2007 · 62 citations · 21 references

Concepts

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