Publication | Closed Access
Effect of film thickness and annealing temperature on hillock distributions in pure Al films
76
Citations
6
References
2006
Year
Materials ScienceMaterials EngineeringAluminium NitrideEngineeringPhysicsHillock DistributionsFilm ThicknessSurface ScienceApplied PhysicsPure Al FilmsThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingMicrostructure
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