Concepedia

Effect of film thickness and annealing temperature on hillock distributions in pure Al films

Soo-Jung Hwang, Je‐Hun Lee, Chang‐Oh Jeong, Young‐Chang Joo

Scripta Materialia · 2006 · 77 citations · 7 references

DOI

Concepts

References

7

Mechanical properties of thin films

William D. Nix · Metallurgical Transactions A · 1989 · 2.5K citations

, , +15

Hillock growth in thin films

P. Chaudhari · Journal of Applied Physics · 1974 · 203 citations

, , +17

Microstructure of thermal hillocks on blanket Al thin films

Deok‐kee Kim, Birgit Heiland, William D. Nix et al. · Thin Solid Films · 2000 · 85 citations

, , +11

Study of the effect of grain boundary migration on hillock formation in Al thin films

Deok‐kee Kim, William D. Nix, Richard P. Vinci et al. · Journal of Applied Physics · 2001 · 54 citations

, , +13

In situ study of stress relaxation mechanisms of pure Al thin films during isothermal annealing

Soo-Jung Hwang, Yong-Duck Lee, Young-Bae Park et al. · Scripta Materialia · 2006 · 41 citations

, , +16