Tuning microwave magnetic properties of FeCoN thin films by controlling dc deposition power

Abstract

In this work, we deposited FeCoN thin films by reactive dc magnetron sputtering under various deposition powers. Composition, microstructure, static magnetic properties, and microwave permeability of as-sputtered films were examined. The permeability spectra were theoretically analyzed based on LLG equation. When high deposition power was applied, μ0′ improved significantly due to the increased Ms and decreased Hk. On the other hand, the damping coefficient λ increased with the power, which resulted in the widen permeability spectra. The physical origin of the influences should be related to the change in the film composition and microstructure, which have immediate impact on static magnetic properties and damping effect of the film.