Simulation of growth dynamics in atomic layer deposition. Part I. Amorphous films - Concepedia

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Simulation of growth dynamics in atomic layer deposition. Part I. Amorphous films

38

Citations

27

References

2007

Year

Ola Nilsen, O. B. Karlsen, Arne Kjekshus, Helmer Fjellvåg

Thin Solid Films

Materials ScienceEngineeringPhysicsSurface ScienceApplied PhysicsGrowth DynamicsThin FilmsAmorphous SolidChemical DepositionChemical Vapor DepositionAtomic Layer DepositionThin Film Processing

References

	Year	Citations

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